Mary Puma

Mary Puma

Former President and Chief Executive Officer of Axcelis Technologies, Inc.

Mary Puma joins Allegro’s Board with more than 40 years of technology experience, including more than 25 years in the semiconductor industry. Ms. Puma served as an Executive Advisor at Axcelis Technologies, Inc. (“Axcelis”) from May 2024 to July 2025, after serving as the Executive Chairperson of Axcelis from May 2023 until May 2024 and as the President and Chief Executive Officer of Axcelis from January 2002 to May 2023. Prior to becoming CEO of Axcelis, she served as the company’s President and Chief Operating Officer beginning in July 2000. Ms. Puma also served as Chairperson of the Board of Axcelis from 2005 to 2015. In 1998, Ms. Puma was appointed General Manager and Vice President of Axcelis’ predecessor, the Implant Systems Division of Eaton Corporation, a global diversified industrial manufacturer, after having joined in 1996 as general manager of Eaton’s Commercial Controls Division. Prior to Eaton, Ms. Puma spent 15 years in various marketing and general management positions at General Electric Company.

Ms. Puma currently serves on the boards of directors of Entegris, Inc., Ciena Corporation, and Penguin Solutions, Inc. (formerly SMART Global Holdings, Inc.). She was a member of the board of directors of Nordson Corporation from July 2001 until November 2023. Ms. Puma also served for 20 years on the board of directors of Semiconductor Equipment and Materials International (“SEMI”), a global industry association serving the manufacturing supply chain for the micro- and nano-electronics industries, and served as Chairperson of the board of directors of SEMI from December 2022 to May 2025.

Ms. Puma holds a B.A. in Economics from Tufts University and a Master of Science degree from the MIT Sloan School of Management.

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